Wafer handling components must never contaminate, scratch or electrostatically damage a wafer. Advanced ceramics meet these demands better than metals or plastics: they are wear-resistant, chemically inert, dimensionally stable, and can be made ESD-safe for cleanroom automation.

Our ceramic end effectors, forks, tines and robot arms are precision machined from high-purity alumina (99%–99.5%), silicon carbide or silicon nitride, matched to the handling load, temperature and process environment. Standard styles include blade-type end effectors for 8"/12" wafer transfer, fork and tine designs for multi-wafer or boat handling, and mechanical/vacuum arm assemblies for wet benches and process tools.

We support custom OEM development: dimensioned from your robot model or drawing, with features such as anti-static Teflon coating, vacuum passages, dowel alignment and custom mounting. Prototypes are machined to verify fit, then scaled to production with individual inspection and packaging suitable for cleanroom delivery.