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HaoRui
custom01001
99 Alumina Ceramic Custom Finishing
Our alumina ceramic tines fork arms are specially designed for high-precision semiconductor wafer handling systems. Manufactured from high-purity Al2O3 ceramic materials, these components provide excellent wear resistance, electrical insulation, thermal stability, and low particle generation performance.
With advanced CNC machining and precision grinding technology, we can achieve tight tolerances and smooth surface finishes suitable for demanding semiconductor automation environments.
The ceramic fork arms are widely used in wafer transfer systems, robotic handling equipment, vacuum automation systems, and cleanroom semiconductor applications.
High precision machining up to ±0.01mm
Excellent wear resistance and long service life
Low particle contamination
High temperature and corrosion resistance
Smooth polished surface finish
Customized structure and dimensions available
Suitable for semiconductor cleanroom environments
We support OEM and custom manufacturing according to drawings or samples, including:
Slots and grooves
Vacuum holes
Complex structural shapes
Surface polishing requirements
Properties of Alumina material (Al2O3)
| Property | Item | 95% Al2O3 | 99% Al2O3 | 99.8%Al2O3 | Unit |
| Mechanical Characteristics | Color | White | light yellow | Ivory | |
| Bulk Density | 3.7 | 3.85 | 3.93 | g/cm3 | |
| Water Absorption | 0 | 0 | 0 | % | |
| Bending Strength | 300 | 310 | 370 | MPa | |
| Compressive Trength | 2,300 | 2,400 | 2500 | MPa | |
| Elastic Modulus | 320 | 340 | 390 | GPa | |
| Fracture Toughness | 3~4 | 3~4 | 4 | MPa m1/2 | |
| Weber Coefficient | 12 | 12 | 12 | m | |
| Vickers Hardness | 1,400 | 1,600 | 1850 | HV 0.5 | |
| Thermal Characterics | Coefficient of Line Thermal Expansion | 7~8 | 7~8 | 7~8 | 10-6 K-1 |
| Thermal Conductivity | 20 | 29 | 32 | W/mK | |
| Thermal Shock Resistance (Put in Water) | 250 | 200 | 280 | ΔT °C | |
| Max Working Temperature | 1,500 | 1,600 | 1700 | °C | |
| Electrical Characteristics | Volume Resistance At 20°C | >1014 | >1014 | >1014 | Ωcm |
| Dielectric Strength | 15×106 | 15×106 | 15×106 | V/m | |
| Dielectric Constant | 9 | 10 | 10 | εr | |
| One MHZ Dielectric Loss Angle at 20°C | 0.0004 | 0.0002 | 0.0001 | tanδ | |
| Chemical Characteristics | Nitric Acid (60%) 90°C | 0.1 | 0.1 | 0.05 | 24H WT Loss mg/cm2 |
| Sulphuric Acid (95%) 95°C | 0.3 | 0.34 | 0.22 | ||
| Caustic Soda (30%) 80°C | 0.9 | 0.95 | 0.04 |
Company overview
Shenzhen Haorui Industrial Technology Co., Ltd. is a professional manufacturer of advanced engineering ceramic components, with 19 years of industry experience since its establishment in June 2006.
Haorui specializes in the precision machining of zirconia ceramic and alumina ceramic structural parts, serving demanding applications in the semiconductor and optical fiber communication industries. With in-house CNC machining, precision grinding, fine polishing and strict inspection processes, we are capable of producing high-precision ceramic components with tight tolerances and stable dimensional accuracy. Our engineering ceramic products are widely used in semiconductor equipment, fiber optic fusion splicers, optical fiber alignment systems, microelectronic devices and precision optoelectronic equipment, where material purity, machining accuracy and long-term stability are critical. Haorui supports OEM & ODM customization, accepting CAD / STEP / PDF drawings, and provides reliable solutions from prototype development to mass production. Backed by a complete quality management system and experienced technical team, we deliver zirconia ceramic structural components with excellent wear resistance, low particle generation and high consistency, suitable for cleanroom and precision environments. Over the past 19 years, Haorui has served more than 1,000 customers worldwide and maintained close cooperation with over 30 universities and research institutions, earning a strong reputation for precision, reliability and professional service in the advanced ceramics industry.
