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silicon carbide ceramic wafer fork/finger

Silicon Carbide Ceramic Fingers, Benefits of Ceramic Robotic Arms
1、Resistant to HF acid corrosion;
2, High temperature resistance;
3, Resistant to abrasion;
4, Small coefficient of thermal expansion, high precision;
  • 0406

Silicon carbide ceramic fork/finger

We specialise in the production of ceramic parts for use in semiconductor equipment, such as silicon carbide ceramic robot arms, ceramic arms, ceramic fork hand, silicon carbide ceramic suction cups, silicon carbide SIC carriers, silicon carbide substrates, and so on. The main materials include 95-99.9% alumina, zirconia, as well as silicon nitride and silicon carbide ceramics. The basic dimensional accuracy can be controlled at about 0.01mm.

Main features:
・Dense texture, high hardness, and high wear resistance.
Good heat resistance
Excellent mechanical strength
・Good insulation properties even in high temperature environment
・Good corrosion resistance

Also known as ceramic fingers, ceramic arms, end-effector, etc., (ceramic manipulator) forms the end of a robotic arm and is used to manipulate and move semiconductor wafers between different positions. It is basically a robot hand, so it is important that it is thermally and dimensionally stable and does not contaminate the chamber with particles or chemical contaminants.

Properties Of Pressureless sintered silicon carbide (SSiC)

ItemTest ConditionsDataUnit
Silicon Carbide Content/
Average Grain Size/4-10micron
Apparent Porosity/<0.5Vol %
Vickers HardnessHV0.52800Kg/mm2
Modulus Of Rupture (3 Points)

Test bar size:

3 x 4 x 40mm

Compression Strength20°C3900MPa
Modulus Of Elasticity20°C420GPa
Fracture Toughness/3.5MPa/m1/2
Thermal Conductivity20°C160W/(mK)
Electrical Resistivity20°C106-108Ωcm
Coefficient of Thermal Expansion20°C-800°C4.3K-110-6
Max. Application TemperatureOxide Atmosphere1600°C
Max. Application TemperatureInert Atmosphere1950°C

This data is the result of laboratory testing. Customers need to judge whether it can be used according to the specific environment.

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Founded in June 2006, Shenzhen Haorui IndustriaI Technology Co.,Ltd. is a professional enterprise engaged in R&D, manufacturing and sales of non-standard industrial ceramics, hard alloys (tungsten steel) and various metal and non-metal precision machinery parts.

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