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0406
Silicon carbide ceramic fork/finger
We specialise in the production of ceramic parts for use in semiconductor equipment, such as silicon carbide ceramic robot arms, ceramic arms, ceramic fork hand, silicon carbide ceramic suction cups, silicon carbide SIC carriers, silicon carbide substrates, and so on. The main materials include 95-99.9% alumina, zirconia, as well as silicon nitride and silicon carbide ceramics. The basic dimensional accuracy can be controlled at about 0.01mm.
Main features:
・Dense texture, high hardness, and high wear resistance.
Good heat resistance
Excellent mechanical strength
・Good insulation properties even in high temperature environment
・Good corrosion resistance
Also known as ceramic fingers, ceramic arms, end-effector, etc., (ceramic manipulator) forms the end of a robotic arm and is used to manipulate and move semiconductor wafers between different positions. It is basically a robot hand, so it is important that it is thermally and dimensionally stable and does not contaminate the chamber with particles or chemical contaminants.
Properties Of Pressureless sintered silicon carbide (SSiC)
| Item | Test Conditions | Data | Unit |
| Silicon Carbide Content | / | >99.5 | % |
| Average Grain Size | / | 4-10 | micron |
| Density | / | >3.14 | g/cm3 |
| Apparent Porosity | / | <0.5 | Vol % |
| Vickers Hardness | HV0.5 | 2800 | Kg/mm2 |
| Modulus Of Rupture (3 Points) | Test bar size: 3 x 4 x 40mm | 450 | MPa |
| Compression Strength | 20°C | 3900 | MPa |
| Modulus Of Elasticity | 20°C | 420 | GPa |
| Fracture Toughness | / | 3.5 | MPa/m1/2 |
| Thermal Conductivity | 20°C | 160 | W/(mK) |
| Electrical Resistivity | 20°C | 106-108 | Ωcm |
| Coefficient of Thermal Expansion | 20°C-800°C | 4.3 | K-110-6 |
| Max. Application Temperature | Oxide Atmosphere | 1600 | °C |
| Max. Application Temperature | Inert Atmosphere | 1950 | °C |
This data is the result of laboratory testing. Customers need to judge whether it can be used according to the specific environment.
Silicon carbide ceramic fork/finger
We specialise in the production of ceramic parts for use in semiconductor equipment, such as silicon carbide ceramic robot arms, ceramic arms, ceramic fork hand, silicon carbide ceramic suction cups, silicon carbide SIC carriers, silicon carbide substrates, and so on. The main materials include 95-99.9% alumina, zirconia, as well as silicon nitride and silicon carbide ceramics. The basic dimensional accuracy can be controlled at about 0.01mm.
Main features:
・Dense texture, high hardness, and high wear resistance.
Good heat resistance
Excellent mechanical strength
・Good insulation properties even in high temperature environment
・Good corrosion resistance
Also known as ceramic fingers, ceramic arms, end-effector, etc., (ceramic manipulator) forms the end of a robotic arm and is used to manipulate and move semiconductor wafers between different positions. It is basically a robot hand, so it is important that it is thermally and dimensionally stable and does not contaminate the chamber with particles or chemical contaminants.
Properties Of Pressureless sintered silicon carbide (SSiC)
| Item | Test Conditions | Data | Unit |
| Silicon Carbide Content | / | >99.5 | % |
| Average Grain Size | / | 4-10 | micron |
| Density | / | >3.14 | g/cm3 |
| Apparent Porosity | / | <0.5 | Vol % |
| Vickers Hardness | HV0.5 | 2800 | Kg/mm2 |
| Modulus Of Rupture (3 Points) | Test bar size: 3 x 4 x 40mm | 450 | MPa |
| Compression Strength | 20°C | 3900 | MPa |
| Modulus Of Elasticity | 20°C | 420 | GPa |
| Fracture Toughness | / | 3.5 | MPa/m1/2 |
| Thermal Conductivity | 20°C | 160 | W/(mK) |
| Electrical Resistivity | 20°C | 106-108 | Ωcm |
| Coefficient of Thermal Expansion | 20°C-800°C | 4.3 | K-110-6 |
| Max. Application Temperature | Oxide Atmosphere | 1600 | °C |
| Max. Application Temperature | Inert Atmosphere | 1950 | °C |
This data is the result of laboratory testing. Customers need to judge whether it can be used according to the specific environment.
