Alumina ceramic tines fork arm for semiconductor industry special ceramic arm handling wafe

Very good electrical insulation.
Moderate to extremely high mechanical strength.
Very high compressive strength.
High hardness.
Moderate thermal conductivity.
High corrosion and wear resistance.
Good gliding properties.
Low density.
Operating temperature without mechanical load 1,000 to 1,700°C.
Bioinert and food compatible.

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Model:
01062
Brand:
HaoRui
Code:
custom01001

Product Description

99 Alumina Ceramic Custom Finishing

Alumina ceramic tines fork arm

The ceramic arm produced by our company is made of high purity alumina ceramic raw material, through cold isostatic pressing, high temperature sintering and precision processing, the dimensional accuracy can reach ±0.001mm, the finish can reach Ra0.1, and the use of temperature can reach up to 1600 degrees.

For ceramic arm with hollow design, our company adopts unique ceramic bonding technology, the temperature of the hollow ceramic arm after bonding can reach up to 800 degrees.

The ceramic arm produced by our company has the properties of high temperature resistance, corrosion resistance, abrasion resistance, insulation, etc. It can be used in high temperature, vacuum and corrosive gas environment for a long time, and is widely used in various semiconductor production equipment.

Properties of Alumina material (Al2O3)

Property	Item	95% Al2O3	99% Al2O3	99.8%Al2O3	Unit
Mechanical Characteristics	Color	White	light yellow	Ivory
	Bulk Density	3.7	3.85	3.93	g/cm³
	Water Absorption	0	0	0	%
	Bending Strength	300	310	370	MPa
	Compressive Trength	2,300	2,400	2500	MPa
	Elastic Modulus	320	340	390	GPa
	Fracture Toughness	3~4	3~4	4	MPa m^1/2
	Weber Coefficient	12	12	12	m
	Vickers Hardness	1,400	1,600	1850	HV 0.5
Thermal Characterics	Coefficient of Line Thermal Expansion	7~8	7~8	7~8	10^-6 K^-1
	Thermal Conductivity	20	29	32	W/mK
	Thermal Shock Resistance (Put in Water)	250	200	280	ΔT °C
	Max Working Temperature	1,500	1,600	1700	°C
Electrical Characteristics	Volume Resistance At 20°C	>10¹⁴	>10¹⁴	>10¹⁴	Ωcm
	Dielectric Strength	15×10⁶	15×10⁶	15×10⁶	V/m
	Dielectric Constant	9	10	10	εr
	One MHZ Dielectric Loss Angle at 20°C	0.0004	0.0002	0.0001	tanδ
Chemical Characteristics	Nitric Acid (60%) 90°C	0.1	0.1	0.05	24H WT Loss mg/cm²
	Sulphuric Acid (95%) 95°C	0.3	0.34	0.22
	Caustic Soda (30%) 80°C	0.9	0.95	0.04