99% Alumina Ceramic End Effector for Wafer Handling | Custom OEM | Hero Ceramic

99% high-purity alumina body — hard, wear-resistant and chemically inert for cleanroom use
Precision-machined thin profile with controlled flatness and dimensional accuracy
Smooth, particle-free surface finish reduces wafer contamination and scratching
Available with vacuum passages, dowel alignment and custom mounting for your robot model
Optional anti-static Teflon coating for ESD-sensitive wafer transfer
Prototype fit-check to OEM production, with individual inspection reports

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Model:
Custom
Brand:
HaoRui
Code:
01037

Product Description

Ceramic End Effector / Handling Arm

Materials：Alumina (Al2O3)
Sizes：Custom according to the drawings
Delivery times：2 -25 days(depends on the quantity)
Precision：Ra 0.1um tolerance: 0.001mm... etc
Features：Heat resistance / Wear resistance / High purity / Refractory / High Corrosion / Good Insulation

Ceramic End Effector / Handling Arm, referred to as ceramic arm, wafer transfer end-effector, refers to the robot used to transport semiconductor wafers. Ceramic robot arm has the advantages of wear-resistant, high temperature-resistant, long service life, anti-static, no damage to the workpiece, etc., and has a broad application prospect in the semiconductor field. The main raw materials of ceramic robot arm include silicon carbide ceramics, silicon nitride ceramics, alumina ceramics and zirconia ceramics.

The most commonly used ceramic material, alumina is relatively inexpensive yet demonstrates favorable properties such as electrical insulation, wear resistance, and chemical stability.

The properties of ceramics handling arm

· Flexural strength	· Chemical resistance	· Electrical insulation	· Corrosion resistance	· Dielectric strength
· Wear resistance	· Temperature resistance	· Thermal conductivity	· High voltage

Alumina material Properties

Property	Item	95% Al2O3	99% Al2O3	99.8%Al2O3	Unit
Mechanical Characteristics	Color	White	light yellow	Ivory
	Bulk Density	3.7	3.85	3.93	g/cm³
	Water Absorption	0	0	0	%
	Bending Strength	300	310	370	MPa
	Compressive Trength	2,300	2,400	2500	MPa
	Elastic Modulus	320	340	390	GPa
	Fracture Toughness	3~4	3~4	4	MPa m^1/2
	Weber Coefficient	12	12	12	m
	Vickers Hardness	1,400	1,600	1850	HV 0.5
Thermal Characterics	Coefficient of Line Thermal Expansion	7~8	7~8	7~8	10^-6 K^-1
	Thermal Conductivity	20	29	32	W/mK
	Thermal Shock Resistance (Put in Water)	250	200	280	ΔT °C
	Max Working Temperature	1,500	1,600	1700	°C
Electrical Characteristics	Volume Resistance At 20°C	>10¹⁴	>10¹⁴	>10¹⁴	Ωcm
	Dielectric Strength	15×10⁶	15×10⁶	15×10⁶	V/m
	Dielectric Constant	9	10	10	εr
	One MHZ Dielectric Loss Angle at 20°C	0.0004	0.0002	0.0001	tanδ
Chemical Characteristics	Nitric Acid (60%) 90°C	0.1	0.1	0.05	24H WT Loss mg/cm²
	Sulphuric Acid (95%) 95°C	0.3	0.34	0.22
	Caustic Soda (30%) 80°C	0.9	0.95	0.04

FAQ:

Which material should I choose for an end effector?
Alumina (99%–99.5%) is the standard choice for wafer handling — rigid, clean and cost-effective. Silicon carbide is preferred where higher stiffness or temperature resistance is needed; silicon nitride suits high-strength and impact-resistance requirements. Material is selected with your robot model and process in mind.
Can you make end effectors for my robot model?
Yes. Provide your robot model or a dimensioned drawing, and we will machine the effector, fork or arm with the correct mounting geometry. Custom features include vacuum passages, dowel holes, anti-static Teflon coating and balancing features.
Do you offer anti-static or coated options?
Yes. Anti-static Teflon coating and other surface treatments are available to reduce particle generation and electrostatic charge during wafer transfer.
What wafer sizes do your end effectors support?
We machine end effectors for 8" and 12" wafer handling as standard, plus custom sizes and multi-wafer fork designs on request.