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05A17
HaoRui
custom01001
Vacuum chucks are used in the thinning, dicing, cleaning, handling, and other processes of semiconductor electronic chips, like wafers.
Why choose microporous ceramic vacuum chucks?
1. During the polishing and cleaning process of wafers, polishing liquid and water mist enter the working table, causing corrosion. And the microporous ceramic vacuum chucks resist corrosion.
2. The microporous ceramic vacuum chuck has no environmental pollution such as light, heat, and electromagnetic, unlike the rubber or other materials vacuum chuck. And the rubber or other materials vacuum chuck will be in direct contact with the surface of the item, so it is very easy to wear.
Therefore, the porous ceramic has high temperature resistance and chemical corrosion resistance, light structure, and electrical insulation. So it is the best choice for vacuum chuck.
3. With its special porous structure, the microporous ceramic has very small holes and can be machined to very precise flatness. Combined with the special air channel design, when a certain negative pressure is given, the wafer can be smoothly and stably adsorbed on the vacuum chuck, so as to avoid wafers that will cause scratches and dents on the surface.
Through the coordination of the focus point and suction force of the vacuum suction cup, wafers of different sizes can be adsorbed on the same ceramic surface.
4. The microporous ceramic vacuum chuck can be reused after regrinding, thereby improving the utilization rate of materials.
Porous ceramic vacuum suction cups applications:
Microporous ceramic vacuum suction cups are often used in applications where a strong and reliable vacuum is required, such as:
In the semiconductor industry, to hold wafers in place during processing
In the automotive industry, to hold parts in place during assembly
In the food industry, to hold food products in place during packaging
In the medical industry, to hold medical devices in place during surgery
Microporous ceramic vacuum suction cups are a versatile and reliable vacuum suction cup that can be used in a variety of applications. They are strong, durable, and easy to use.
Material properties:
| Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
| colour | White | Light yellow | White | Black | Black | Grey | White |
| Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
| water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
| Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
| Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
| Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
| Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
| heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
| dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
| This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. | |||||||
Product customisation:
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.
Vacuum chucks are used in the thinning, dicing, cleaning, handling, and other processes of semiconductor electronic chips, like wafers.
Why choose microporous ceramic vacuum chucks?
1. During the polishing and cleaning process of wafers, polishing liquid and water mist enter the working table, causing corrosion. And the microporous ceramic vacuum chucks resist corrosion.
2. The microporous ceramic vacuum chuck has no environmental pollution such as light, heat, and electromagnetic, unlike the rubber or other materials vacuum chuck. And the rubber or other materials vacuum chuck will be in direct contact with the surface of the item, so it is very easy to wear.
Therefore, the porous ceramic has high temperature resistance and chemical corrosion resistance, light structure, and electrical insulation. So it is the best choice for vacuum chuck.
3. With its special porous structure, the microporous ceramic has very small holes and can be machined to very precise flatness. Combined with the special air channel design, when a certain negative pressure is given, the wafer can be smoothly and stably adsorbed on the vacuum chuck, so as to avoid wafers that will cause scratches and dents on the surface.
Through the coordination of the focus point and suction force of the vacuum suction cup, wafers of different sizes can be adsorbed on the same ceramic surface.
4. The microporous ceramic vacuum chuck can be reused after regrinding, thereby improving the utilization rate of materials.
Porous ceramic vacuum suction cups applications:
Microporous ceramic vacuum suction cups are often used in applications where a strong and reliable vacuum is required, such as:
In the semiconductor industry, to hold wafers in place during processing
In the automotive industry, to hold parts in place during assembly
In the food industry, to hold food products in place during packaging
In the medical industry, to hold medical devices in place during surgery
Microporous ceramic vacuum suction cups are a versatile and reliable vacuum suction cup that can be used in a variety of applications. They are strong, durable, and easy to use.
Material properties:
| Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
| colour | White | Light yellow | White | Black | Black | Grey | White |
| Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
| water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
| Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
| Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
| Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
| Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
| heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
| dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
| This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. | |||||||
Product customisation:
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.
