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05A17
HaoRui
custom01001
Vacuum chucks are used in the thinning, dicing, cleaning, handling, and other processes of semiconductor electronic chips, like wafers.
Ceramic Vacuum Chuck is a kind of uniform solid or vacuum body produced by using nano-powder. A large number of connected or closed ceramic materials are generated in the material through high-temperature sintering.
The material is Al2O3 or SIC, which is widely used in Semiconductors and electronic devices.
In these applications, it can fix semiconductor wafers, glass substrate materials and other working objects by Vacuum Suction.
Compared with the characteristics of traditional suction cups for the single specification of workpieces, the regional suction function of Ceramic Vacuum suction cups helps to improve the smoothness of the production line and its performance, also avoid the traditional suction cups on the workpiece (especially the Thin Film material) scratches and suction marks.
measuring, checking and machining of thin-walled substrates (e.g., papers, foils, circuit boards, wafers, PCB boards),
fine (e.g., optics) and
flexible (e.g., rubber) materials
measuring and testing
pecision machining
silicon wafer production
Microporous ceramic vacuum suction cups are a versatile and reliable vacuum suction cup that can be used in a variety of applications. They are strong, durable, and easy to use.
Material properties:
| Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
| colour | White | Light yellow | White | Black | Black | Grey | White |
| Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
| water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
| Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
| Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
| Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
| Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
| heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
| dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
| This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. | |||||||
Product customisation:
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.
Vacuum chucks are used in the thinning, dicing, cleaning, handling, and other processes of semiconductor electronic chips, like wafers.
Ceramic Vacuum Chuck is a kind of uniform solid or vacuum body produced by using nano-powder. A large number of connected or closed ceramic materials are generated in the material through high-temperature sintering.
The material is Al2O3 or SIC, which is widely used in Semiconductors and electronic devices.
In these applications, it can fix semiconductor wafers, glass substrate materials and other working objects by Vacuum Suction.
Compared with the characteristics of traditional suction cups for the single specification of workpieces, the regional suction function of Ceramic Vacuum suction cups helps to improve the smoothness of the production line and its performance, also avoid the traditional suction cups on the workpiece (especially the Thin Film material) scratches and suction marks.
measuring, checking and machining of thin-walled substrates (e.g., papers, foils, circuit boards, wafers, PCB boards),
fine (e.g., optics) and
flexible (e.g., rubber) materials
measuring and testing
pecision machining
silicon wafer production
Microporous ceramic vacuum suction cups are a versatile and reliable vacuum suction cup that can be used in a variety of applications. They are strong, durable, and easy to use.
Material properties:
| Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
| colour | White | Light yellow | White | Black | Black | Grey | White |
| Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
| water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
| Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
| Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
| Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
| Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
| heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
| dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
| This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. | |||||||
Product customisation:
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.
