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Customised Alumina silicon carbide Microporous Semiconductor square ceramic Vacuum chucks

Resistant to high temperature, abrasion, chemical corrosion, 
high mechanical strength, 
easy to regenerate and excellent thermal shock resistance.
  • 05A17

  • HaoRui

  • custom01001

Vacuum chucks are used in the thinning, dicing, cleaning, handling, and other processes of semiconductor electronic chips, like wafers. 

Ceramic Vacuum Chuck is a kind of uniform solid or vacuum body produced by using nano-powder. A large number of connected or closed ceramic materials are generated in the material through high-temperature sintering.

The material is Al2O3 or SIC, which is widely used in Semiconductors and electronic devices.

In these applications, it can fix semiconductor wafers, glass substrate materials and other working objects by Vacuum Suction.

Compared with the characteristics of traditional suction cups for the single specification of workpieces, the regional suction function of Ceramic Vacuum suction cups helps to improve the smoothness of the production line and its performance, also avoid the traditional suction cups on the workpiece (especially the Thin Film material) scratches and suction marks.


  • measuring, checking and machining of thin-walled substrates (e.g., papers, foils, circuit boards, wafers, PCB boards),

  • fine (e.g., optics) and

  • flexible (e.g., rubber) materials

  • measuring and testing

  • pecision machining

  • silicon wafer production

Microporous ceramic vacuum suction cups are a versatile and reliable vacuum suction cup that can be used in a variety of applications. They are strong, durable, and easy to use.

Material properties:

Property95%Al2O399%Al2O3Zirconia CeramicsSilicon carbide (SiC)Silicon nitride (Si3N4)Aluminum Nitride (AlN)Machinable ceramics
colourWhite Light yellow White BlackBlack Grey White
Density g/cm33.7g/cm33.9g/cm36.02g/cm33.2g/cm33.25g/cm33.2g/cm32.48g/cm3
water absorption0 %0 %0 %0 %0 %0 %0 %
Hardness (HV)23.723.716.53320--
Flexural strength (MPa)300MPa400MPa1100MPa450MPa800MPa310MPa91MPa
Compressive strength (MPa)2500MPa2800MPa3600MPa2000MPa2600MPa-340MPa
Young's modulus of elasticity300GPa300GPa320GPa450GPa290GPa310~350GPa65GPa
heat conductivity20W/m°C32W/m°C3W/m°C50W/m°C25W/m°C150W/m°C1.46W/m°C
dielectric strength14KV/mm14KV/mm14KV/mm14KV/mm14KV/mm14KV/mm14KV/mm
Volume resistivity (25°C)>1014Ω·cm>1014Ω·cm>1014Ω·cm>105Ω·cm>1014Ω·cm>1014Ω·cm>1014Ω·cm
This data is typical of laboratory tests and the actual characteristics of specific production lots may vary.

Product customisation:

Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.

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Founded in June 2006, Shenzhen Haorui IndustriaI Technology Co.,Ltd. is a professional enterprise engaged in R&D, manufacturing and sales of non-standard industrial ceramics, hard alloys (tungsten steel) and various metal and non-metal precision machinery parts.

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