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Customised Semiconductor microporous ceramics vacuum chuck porous ceramics alumina silicon carbide ceramics

Resistant to high temperature, abrasion, chemical corrosion, 
high mechanical strength, 
easy to regenerate and excellent thermal shock resistance.
Availability:
Quantity:
  • 05A06

  • HaoRui

  • custom01001

Shenzhen Haorui Industrial Technology Co., Ltd. 




Founded in June 2006, the company is a professional enterprise specialising in the research, development, manufacture and sales of non-standard industrial ceramics, cemented carbide (tungsten steel), and all kinds of metallic and non-metallic precision mechanical parts.

After more than 15 years of development, we have accumulated rich experience in the industry and cultivated a group of professional technicians. We have a perfect production process and quality management system, as well

as a set of precision machining equipment and testing equipment. At present, we have more than 3,000 customers at home and abroad, and have cooperated with more than 30 colleges and research institutes, and have a highreputation and good word of mouth in the same industry, the company's overall strength is in the leading position in the industry.


Microporous ceramic suction cups, is the use of vacuum adsorption principle of fixed workpiece bearing platform, after a special nano-powder process made by high-temperature sintering in the material inside each other connected or closed. The microporous ceramic suction cups produced by the company can be used with mainstream equipment at home and abroad, with superior performance.


Porous ceramic materials include alumina and silicon carbide, which have excellent physical and chemical properties and can maintain stable performance in harsh environments such as high temperature, high pressure, and corrosion.


Product Specifications:

1、Base and frame material: aluminium alloy, stainless steel, ceramics
2、Size range:φ/5-500mm
3、Microporous size:1-700μm
4、Porosity:30-40%
5、Ventilation uniformity:10×10mm
6、Differential pressure in the area:±3Kpa


We can customize components in ways that perfectly match with the shape and material of the wafer, with your equipment and conditions.We will respond to your various dimensional and material needs to match your exact specification.Even if you require only a single piece for evaluation, do not hesitate to contact us. We are eager to customize chucks for multiple workpieces or for your testing purposes.






Material properties:


Property95%Al2O399%Al2O3Zirconia CeramicsSilicon carbide (SiC)Silicon nitride (Si3N4)Aluminum Nitride (AlN)Machinable ceramics
colourWhite Light yellow White BlackBlack Grey White
Density g/cm33.7g/cm33.9g/cm36.02g/cm33.2g/cm33.25g/cm33.2g/cm32.48g/cm3
water absorption0 %0 %0 %0 %0 %0 %0 %
Hardness (HV)23.723.716.53320--
Flexural strength (MPa)300MPa400MPa1100MPa450MPa800MPa310MPa91MPa
Compressive strength (MPa)2500MPa2800MPa3600MPa2000MPa2600MPa-340MPa
Young's modulus of elasticity300GPa300GPa320GPa450GPa290GPa310~350GPa65GPa
heat conductivity20W/m°C32W/m°C3W/m°C50W/m°C25W/m°C150W/m°C1.46W/m°C
dielectric strength14KV/mm14KV/mm14KV/mm14KV/mm14KV/mm14KV/mm14KV/mm
Volume resistivity (25°C)>1014Ω·cm>1014Ω·cm>1014Ω·cm>105Ω·cm>1014Ω·cm>1014Ω·cm>1014Ω·cm
This data is typical of laboratory tests and the actual characteristics of specific production lots may vary.

Product customisation:

Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.


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Founded in June 2006, Shenzhen Haorui IndustriaI Technology Co.,Ltd. is a professional enterprise engaged in R&D, manufacturing and sales of non-standard industrial ceramics, hard alloys (tungsten steel) and various metal and non-metal precision machinery parts.

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