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Ceramic End Effectors Wafer Handling for The Semiconductor Industry,

• High purity
• Good chemical durability
• High rigidity
• Mirror polished surface
Availability:
Quantity:
  • Custom

  • HaoRui

  • 01036

Ceramic Arms are used to manipulate and carry silicon wafers through the whole production in the semiconductor process. It enables the handling of large-size wafers and can be designed with vacuum channels in order to hold the part.

In robotics, an end effector is a device or tool that's connected to the end of a robot arm where the hand would be. The end effector is the part of the robot that interacts with the environment. The structure of an end effector and the nature of the programming and hardware that drives it depends on the task the robot will be performing. If a robot needs to pick something up, a type of robot hand called a gripper is the most functional end effector.
Ceramics have superior mechanical, electrical, and thermal properties ideal for quality components. The durability of fine ceramics makes it ideal for mechanical and thermal loads that are abrasive and in a chemically harsh environment.


Properties of the Alumina material 

PropertyItem95% Al2O399% Al2O399.8%Al2O3Unit
Mechanical CharacteristicsColorWhitelight yellowIvory
Bulk Density3.73.853.93g/cm3
Water Absorption000%
Bending Strength300310370MPa
Compressive Trength2,3002,4002500MPa
Elastic Modulus320340390GPa
Fracture Toughness3~43~44MPa m1/2
Weber Coefficient121212m
Vickers Hardness1,4001,6001850HV 0.5
Thermal Characterics
Coefficient of Line Thermal
Expansion
7~87~87~810-6 K-1
Thermal Conductivity202932W/mK
Thermal Shock Resistance
(Put in Water)
250200280ΔT °C
Max Working Temperature1,5001,6001700°C
Electrical CharacteristicsVolume Resistance At 20°C>1014>1014>1014Ωcm
Dielectric Strength15×10615×10615×106V/m
Dielectric Constant91010εr
One MHZ Dielectric Loss Angle
at 20°C
0.00040.00020.0001tanδ
Chemical CharacteristicsNitric Acid (60%) 90°C0.10.10.0524H WT Loss mg/cm2
Sulphuric Acid (95%) 95°C0.30.340.22
Caustic Soda (30%) 80°C0.90.950.04

Precision of manufacture


Dimensional accuracyUp to 0.001mm
SmoothnessHighest possible mirror
ConcentricityUp to 0.003mm
ParallelismUp to 0.002mm
The inner hole toleranceThe minimum  0.005mm
Straight fluteThe narrowest 0.1x100mm
The thickness of the sizeMinimum to 0.02mm
The screw threadMinimum internal thread M2
CylindricityUp to 0.004mm
The linear toleranceUp to 0.001mm
The smallest apertureThe minimum 0.07mm
Precision processCNC maching,grinding,lapping
Surface finishGlazed,polishing or metallized
Visual quality:
1. No cracks,  no dark dots, no contamination and sharp edges;
2. Evenly distributed glaze with very smooth surface




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Founded in June 2006, Shenzhen Haorui IndustriaI Technology Co.,Ltd. is a professional enterprise engaged in R&D, manufacturing and sales of non-standard industrial ceramics, hard alloys (tungsten steel) and various metal and non-metal precision machinery parts.

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