Home / Products / Aluminum Oxide (Al2O3) / Alumina Ceramic mechining fork wafer transfer end-effector for semiconductor industry

loading

Share to:
facebook sharing button
twitter sharing button
line sharing button
wechat sharing button
linkedin sharing button
pinterest sharing button
whatsapp sharing button
sharethis sharing button

Alumina Ceramic mechining fork wafer transfer end-effector for semiconductor industry

  • Very good electrical insulation.
  • Moderate to extremely high mechanical strength.
  • Very high compressive strength.
  • High hardness.
  • Moderate thermal conductivity.
  • High corrosion and wear resistance.
  • Good gliding properties.
  • Low density.
  • Operating temperature without mechanical load 1,000 to 1,700°C.
  • Bioinert and food compatible.
Availability:
Quantity:
  • 01063

  • HaoRui

  • custom01001

99 Alumina Ceramic Custom Finishing


Alumina Ceramic mechanical arm robot


Alumina ceramics are structural ceramics with a hardness second only to diamond, and their wear resistance far exceeds that of steel and chrome steel. Alumina ceramics have the characteristics of high temperature resistance, abrasion resistance, corrosion resistance, low coefficient of friction, light weight, and the highest operating temperature can reach 1600 ℃, which is suitable for the semiconductor industry.


Alumina ceramics can be said to be a very high hardness material, that means the processing is very difficult. Alumina ceramic robot arm, also known as alumina ceramic fork, wafer transfer end-effector, is a part made of alumina ceramics, mounted on the wafer handling robot, equivalent to the robot's hand, is responsible for handling the wafer silicon wafers to the designated location, its surface in direct contact with the wafer. 

Alumina ceramic robot arm is lightweight, which can effectively reduce the equipment load and improve the service life of the equipment. Alumina mechanical vacuum arm used in the semiconductor industry, mainly responsible for the transfer of wafers, the requirements for processing accuracy is better, the processing process is a difficult point in the industry, SHENZHEN HAORUI INDUSTRIAL ceramics is a professional engaged in ceramic processing manufacturers, summary and innovative research and development of a variety of processing techniques. Has solved the problem of chipping in the ceramic processing.We provide professional efficient,high-quality services,constantly innovate in technology and products.




Properties of Alumina material (Al2O3)


Property
Item
95% Al2O3
99% Al2O3
99.8%Al2O3
Unit
Mechanical Characteristics
Color
White
light yellow
Ivory

Bulk Density
3.7
3.85
3.93
g/cm3
Water Absorption
0
0
0
%
Bending Strength
300
310
370
MPa
Compressive Trength
2,300
2,400
2500
MPa
Elastic Modulus
320
340
390
GPa
Fracture Toughness
3~4
3~4
4
MPa m1/2
Weber Coefficient
12
12
12
m
Vickers Hardness
1,400
1,600
1850
HV 0.5
Thermal Characterics
Coefficient of Line Thermal
Expansion
7~8
7~8
7~8
10-6 K-1
Thermal Conductivity
20
29
32
W/mK
Thermal Shock Resistance
(Put in Water)
250
200
280
ΔT °C
Max Working Temperature
1,500
1,600
1700
°C
Electrical Characteristics
Volume Resistance At 20°C
>1014
>1014
>1014
Ωcm
Dielectric Strength
15×106
15×106
15×106
V/m
Dielectric Constant
9
10
10
εr
One MHZ Dielectric Loss Angle
at 20°C
0.0004
0.0002
0.0001
tanδ
Chemical Characteristics
Nitric Acid (60%) 90°C
0.1
0.1
0.05
24H WT Loss mg/cm2
Sulphuric Acid (95%) 95°C
0.3
0.34
0.22
Caustic Soda (30%) 80°C
0.9
0.95
0.04


Previous: 
Next: 

Related Products

Leave a Message
Contact Us
Founded in June 2006, Shenzhen Haorui IndustriaI Technology Co.,Ltd. is a professional enterprise engaged in R&D, manufacturing and sales of non-standard industrial ceramics, hard alloys (tungsten steel) and various metal and non-metal precision machinery parts.

Quick Links

Product Category

Contact Us
Copyright © 2022 Shenzhen Haorui IndustriaI Technology Co.,Ltd. All rights reserved. Privacy Policy | Sitemap | Support By Leadong