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HAORUI
Microporous Ceramic Vacuum Chuck Ø226mm – High Precision Porous Chuck for Wafer Dicing & Semiconductor Processing
Microporous ceramics are a new class of inorganic non-metallic porous materials. They are primarily composed of three elements: aggregate particles, binders, and pores. The typical raw materials used as aggregates include:
Quartz sand
Corundum
Alumina (Al₂O₃)
Silicon carbide (SiC)
Mullite (2Al₂O₃·3SiO₂)
Other ceramic granules
These are mixed with appropriate binders and pore-forming agents, then formed and sintered at high temperatures. The type of aggregate, binder, and pore-forming conditions collectively determine the key characteristics of the ceramic, such as pore size, porosity, and air permeability.
Aggregate properties are selected according to the intended use of the final product. Ideal aggregates should offer:
High mechanical strength
Excellent heat and corrosion resistance
Near-spherical shapes (to optimize flow paths and pore structure)
Controlled particle size distribution
Strong affinity with the binder
Under the same binder and particle size conditions, pore size, porosity, and permeability can be optimized by adjusting sintering parameters and forming techniques.
Microporous ceramics offer a unique combination of properties:
Excellent adsorption and filtration capabilities
High permeability
Strong chemical resistance
Environmental and biological compatibility
Tailorable surface structure for specific physical and chemical performance
Thanks to their functional versatility, microporous ceramics are widely used in the following industries and applications:
Gas and liquid filtration
Biological enzyme carriers
Bio-compatible implant materials
Catalyst supports
Environmental engineering (e.g. air and water purification)
Aerospace and energy-saving technologies
Chemical and petrochemical processing
Metallurgy and thermal processing
Food and pharmaceutical industries
Medical devices and artificial organs
Sound insulation and shock absorption
Heat exchangers
Ceramic packing materials and porous bricks
As a cutting-edge ceramic material, microporous ceramics are attracting extensive research and industrial investment globally. With expanding applications in environmental protection, biomedicine, and advanced manufacturing, microporous ceramics are expected to play a pivotal role in shaping the future of sustainable and high-performance materials.
Microporous Ceramic Vacuum Chuck Ø226mm – High Precision Porous Chuck for Wafer Dicing & Semiconductor Processing
Microporous ceramics are a new class of inorganic non-metallic porous materials. They are primarily composed of three elements: aggregate particles, binders, and pores. The typical raw materials used as aggregates include:
Quartz sand
Corundum
Alumina (Al₂O₃)
Silicon carbide (SiC)
Mullite (2Al₂O₃·3SiO₂)
Other ceramic granules
These are mixed with appropriate binders and pore-forming agents, then formed and sintered at high temperatures. The type of aggregate, binder, and pore-forming conditions collectively determine the key characteristics of the ceramic, such as pore size, porosity, and air permeability.
Aggregate properties are selected according to the intended use of the final product. Ideal aggregates should offer:
High mechanical strength
Excellent heat and corrosion resistance
Near-spherical shapes (to optimize flow paths and pore structure)
Controlled particle size distribution
Strong affinity with the binder
Under the same binder and particle size conditions, pore size, porosity, and permeability can be optimized by adjusting sintering parameters and forming techniques.
Microporous ceramics offer a unique combination of properties:
Excellent adsorption and filtration capabilities
High permeability
Strong chemical resistance
Environmental and biological compatibility
Tailorable surface structure for specific physical and chemical performance
Thanks to their functional versatility, microporous ceramics are widely used in the following industries and applications:
Gas and liquid filtration
Biological enzyme carriers
Bio-compatible implant materials
Catalyst supports
Environmental engineering (e.g. air and water purification)
Aerospace and energy-saving technologies
Chemical and petrochemical processing
Metallurgy and thermal processing
Food and pharmaceutical industries
Medical devices and artificial organs
Sound insulation and shock absorption
Heat exchangers
Ceramic packing materials and porous bricks
As a cutting-edge ceramic material, microporous ceramics are attracting extensive research and industrial investment globally. With expanding applications in environmental protection, biomedicine, and advanced manufacturing, microporous ceramics are expected to play a pivotal role in shaping the future of sustainable and high-performance materials.
