Alumina End Effectors Wafer Handling

Ceramic End Effector / Handling Arm is installed on wafer handling robot or "end effectors" and used to carry silicon wafers into or out of cassettes or process chambers.
The benefits of using ceramics are reduction of deflection due to high flexural strength, resistance to high temperatures, and elimination of metal contamination and particles.

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Model:
Custom
Brand:
HaoRui
Code:
01037

Product Description

Ceramic End Effector / Handling Arm

Materials：Alumina (Al2O3)
Sizes：Custom according to the drawings
Delivery times：2 -25 days(depends on the quantity)
Precision：Ra 0.1um tolerance: 0.001mm... etc
Features：Heat resistance / Wear resistance / High purity / Refractory / High Corrosion / Good Insulation

Ceramic End Effector / Handling Arm, referred to as ceramic arm, wafer transfer end-effector, refers to the robot used to transport semiconductor wafers. Ceramic robot arm has the advantages of wear-resistant, high temperature-resistant, long service life, anti-static, no damage to the workpiece, etc., and has a broad application prospect in the semiconductor field. The main raw materials of ceramic robot arm include silicon carbide ceramics, silicon nitride ceramics, alumina ceramics and zirconia ceramics.

The most commonly used ceramic material, alumina is relatively inexpensive yet demonstrates favorable properties such as electrical insulation, wear resistance, and chemical stability.

The properties of ceramics handling arm

· Flexural strength	· Chemical resistance	· Electrical insulation	· Corrosion resistance	· Dielectric strength
· Wear resistance	· Temperature resistance	· Thermal conductivity	· High voltage

Alumina material Properties

Property	Item	95% Al2O3	99% Al2O3	99.8%Al2O3	Unit
Mechanical Characteristics	Color	White	light yellow	Ivory
	Bulk Density	3.7	3.85	3.93	g/cm³
	Water Absorption	0	0	0	%
	Bending Strength	300	310	370	MPa
	Compressive Trength	2,300	2,400	2500	MPa
	Elastic Modulus	320	340	390	GPa
	Fracture Toughness	3~4	3~4	4	MPa m^1/2
	Weber Coefficient	12	12	12	m
	Vickers Hardness	1,400	1,600	1850	HV 0.5
Thermal Characterics	Coefficient of Line Thermal Expansion	7~8	7~8	7~8	10^-6 K^-1
	Thermal Conductivity	20	29	32	W/mK
	Thermal Shock Resistance (Put in Water)	250	200	280	ΔT °C
	Max Working Temperature	1,500	1,600	1700	°C
Electrical Characteristics	Volume Resistance At 20°C	>10¹⁴	>10¹⁴	>10¹⁴	Ωcm
	Dielectric Strength	15×10⁶	15×10⁶	15×10⁶	V/m
	Dielectric Constant	9	10	10	εr
	One MHZ Dielectric Loss Angle at 20°C	0.0004	0.0002	0.0001	tanδ
Chemical Characteristics	Nitric Acid (60%) 90°C	0.1	0.1	0.05	24H WT Loss mg/cm²
	Sulphuric Acid (95%) 95°C	0.3	0.34	0.22
	Caustic Soda (30%) 80°C	0.9	0.95	0.04