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06A08
HaoRui
06A08
The top insulation plate closes off a process chamber or heated module. It blocks heat and voltage from reaching the cover above, while its cut-outs and slot windows leave the process view, gas routes and wiring clears exactly where the tool needs them.
Plates like this are consumed parts in many tools — replaced on maintenance cycles. We produce them two ways: as exact replacements matched to your sample or part number, and as OEM production for equipment builders who need repeatable batches against a frozen drawing.
Because machinable glass ceramic is machined in its final state, a replacement plate matches the original geometry without mould work: send the used part or the drawing, and the first article is compared against your critical dimensions before the batch runs.
Form: square plate with central cut-out and slot windows
Material: machinable glass ceramic (Macor-type equivalent)
Function: top-cover heat and electrical barrier
Two supply modes: replacement parts & OEM batch production
First-article inspection against critical dimensions
Documentation: material and dimensional reports on request
Central cut-outs, rectangular windows and small clearance holes are placed exactly as the tool requires — the rest of the plate stays solid and continuous as the insulation barrier.
Obsolete or maintenance-cycle plates are reproduced from a sample or legacy drawing. No tooling investment, and a first article is approved before batch production starts.
OEM batches are machined from the same blank stock and fixturing against a frozen drawing, so the plate fitted at the next maintenance cycle behaves like the one it replaces.
Accepted files: STEP, STP, DWG, DXF, PDF with dimensions. For replacements, a used part plus key dimensions is enough to start. Quotes normally within one working day.
Semiconductor process tools — top covers over heated chambers
Deposition and etch equipment — insulating barrier plates
Test systems — cover plates with instrument access windows
Laser systems — isolation covers around hot assemblies
Cut-out geometry: circles, rectangles, custom windows
Mounting: hole pattern, counterbores, edge notches
Thickness: single or stepped sections
Supply mode: one-off replacements or scheduled batches
Marking: laser part numbers for maintenance tracking
STEP, DWG, DXF, PDF — or send the used part with key dimensions. We reply within one working day with price, lead time and manufacturability notes.
Or email sales@heroceramic.com
We use your drawing only to quote this part. No mailing list.
