Home / Products / Aluminum Oxide (Al2O3) / Fork-finger Electrode Alumina Ceramic Circuit wafer transfer end-effector for semiconductor industry

loading

Share to:
facebook sharing button
twitter sharing button
line sharing button
wechat sharing button
linkedin sharing button
pinterest sharing button
whatsapp sharing button
sharethis sharing button

Fork-finger Electrode Alumina Ceramic Circuit wafer transfer end-effector for semiconductor industry

  • Very good electrical insulation.
  • Moderate to extremely high mechanical strength.
  • Very high compressive strength.
  • High hardness.
  • Moderate thermal conductivity.
  • High corrosion and wear resistance.
  • Good gliding properties.
  • Low density.
  • Operating temperature without mechanical load 1,000 to 1,700°C.
  • Bioinert and food compatible.
Availability:
Quantity:
  • 01064

  • HaoRui

  • custom01001

99 Alumina Ceramic Custom Finishing


Alumina Ceramic End Effector / Ceramic Arm


Ceramic End Effector / Ceramic Arm are used to manipulate and carry silicon wafers through the whole production in the semiconductor process. It enables the handling of large-size wafers and can be designed with vacuum channels in order to hold the part.

Ceramic end effectors and ceramic arms play a crucial role in the semiconductor industry, facilitating the manipulation and transportation of silicon wafers throughout the entire production process. These innovative tools are specifically designed to accommodate large-size wafers, offering precision and efficiency in handling delicate components. By incorporating vacuum channels into their design, they ensure a secure grip on the wafers, enhancing stability and reliability during manufacturing operations. The use of ceramic materials in end effectors and arms not only ensures durability and longevity but also contributes to the overall quality and performance of semiconductor devices.


 SHENZHEN HAORUI INDUSTRIAL ceramics is a professional engaged in ceramic processing manufacturers, summary and innovative research and development of a variety of processing techniques. Has solved the problem of chipping in the ceramic processing.We provide professional efficient,high-quality services,constantly innovate in technology and products.



Properties of Alumina material (Al2O3)


Property
Item
95% Al2O3
99% Al2O3
99.8%Al2O3
Unit
Mechanical Characteristics
Color
White
light yellow
Ivory

Bulk Density
3.7
3.85
3.93
g/cm3
Water Absorption
0
0
0
%
Bending Strength
300
310
370
MPa
Compressive Trength
2,300
2,400
2500
MPa
Elastic Modulus
320
340
390
GPa
Fracture Toughness
3~4
3~4
4
MPa m1/2
Weber Coefficient
12
12
12
m
Vickers Hardness
1,400
1,600
1850
HV 0.5
Thermal Characterics
Coefficient of Line Thermal
Expansion
7~8
7~8
7~8
10-6 K-1
Thermal Conductivity
20
29
32
W/mK
Thermal Shock Resistance
(Put in Water)
250
200
280
ΔT °C
Max Working Temperature
1,500
1,600
1700
°C
Electrical Characteristics
Volume Resistance At 20°C
>1014
>1014
>1014
Ωcm
Dielectric Strength
15×106
15×106
15×106
V/m
Dielectric Constant
9
10
10
εr
One MHZ Dielectric Loss Angle
at 20°C
0.0004
0.0002
0.0001
tanδ
Chemical Characteristics
Nitric Acid (60%) 90°C
0.1
0.1
0.05
24H WT Loss mg/cm2
Sulphuric Acid (95%) 95°C
0.3
0.34
0.22
Caustic Soda (30%) 80°C
0.9
0.95
0.04


Previous: 
Next: 

Related Products

Leave a Message
Contact Us
Founded in June 2006, Shenzhen Haorui IndustriaI Technology Co.,Ltd. is a professional enterprise engaged in R&D, manufacturing and sales of non-standard industrial ceramics, hard alloys (tungsten steel) and various metal and non-metal precision machinery parts.

Quick Links

Product Category

Contact Us
Copyright © 2022 Shenzhen Haorui IndustriaI Technology Co.,Ltd. All rights reserved. Privacy Policy | Sitemap | Support By Leadong