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Ceramic fingers, ceramic robotic arms

• High purity
• Good chemical durability
• High rigidity
• Mirror polished surface
Availability:
Quantity:
  • Custom

  • HaoRui

  • 01042

Ceramic arms for semiconductor equipment wafer disc drives. 


Precision ceramic parts have good structural strength, high temperature resistance, high pressure resistance, good precision, good parallelism, uniformity of weave, and high strength. They have been used by semiconductor manufacturers for many years. 


High heat and temperature resistant

The ceramic handling arm have a excellent high heat temperature resistant ability. ceramic handling arm can be used under 2200 ℃ high temperature environment.Coefficient of thermal expansion up to 13* 10∧6 from 20°C -1000°C. up to 2800°C Melting point.



Wear and hardness resistant


The ceramic handling arm is better wear and abrasion resistant property than metal. The ceramic handling arm hardness (mohs)up to 9, HRA 80 - 90. ceramic handling arm hardness is not second only to diamond, but far beyond the wear resistance of steel and stainless steel.



Our technology

Haorui has a group of excellent engineers who have unique and excellent technology in ceramic special shaped processing projects, special shaped processing technology is the strength of our company.

We are skilled at producing ceramic semiconductor components with complex geometry and designs. Our goal is to provide high-quality, low-cost semiconductor ceramic parts by leveraging our innovative manufacturing processes and techniques.

Please contact us


Alumina material Properties 


Property
Item
95% Al2O3
99% Al2O3
99.8%Al2O3
Unit
Mechanical Characteristics
Color
White
light yellow
Ivory

Bulk Density
3.7
3.85
3.93
g/cm3
Water Absorption
0
0
0
%
Bending Strength
300
310
370
MPa
Compressive Trength
2,300
2,400
2500
MPa
Elastic Modulus
320
340
390
GPa
Fracture Toughness
3~4
3~4
4
MPa m1/2
Weber Coefficient
12
12
12
m
Vickers Hardness
1,400
1,600
1850
HV 0.5
Thermal Characterics
Coefficient of Line Thermal
Expansion
7~8
7~8
7~8
10-6 K-1
Thermal Conductivity
20
29
32
W/mK
Thermal Shock Resistance
(Put in Water)
250
200
280
ΔT °C
Max Working Temperature
1,500
1,600
1700
°C
Electrical Characteristics
Volume Resistance At 20°C
>1014
>1014
>1014
Ωcm
Dielectric Strength
15×106
15×106
15×106
V/m
Dielectric Constant
9
10
10
εr
One MHZ Dielectric Loss Angle
at 20°C
0.0004
0.0002
0.0001
tanδ
Chemical Characteristics
Nitric Acid (60%) 90°C
0.1
0.1
0.05
24H WT Loss mg/cm2
Sulphuric Acid (95%) 95°C
0.3
0.34
0.22
Caustic Soda (30%) 80°C
0.9
0.95
0.04





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Founded in June 2006, Shenzhen Haorui IndustriaI Technology Co.,Ltd. is a professional enterprise engaged in R&D, manufacturing and sales of non-standard industrial ceramics, hard alloys (tungsten steel) and various metal and non-metal precision machinery parts.

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