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Precision Zirconia Ceramic Sleeve for Semiconductor Equipment | Custom ZrO₂ Ceramic Components

★Edge opening, very sharp
★Extremely high bending strength and hardness
★High density - up to 6.0 g/cm^3
★Low thermal conductivity
★Other features: high electrical insulation, high corrosion resistance, high biocompatibility

Category: Zirconia Ceramic Parts
Tags: Industrial Applications
Availability:
Quantity:
  • 02A36

  • HaoRui

  • custom01A35

Product Description

Custom Precision Zirconia Ceramic Liner Sleeve

Haorui Industrial Ceramics specializes in the manufacturing of custom zirconia ceramic liner sleeves designed for demanding industrial environments requiring exceptional wear resistance, corrosion resistance, and dimensional stability.

Manufactured from high-purity zirconium oxide (ZrO₂), these ceramic sleeves provide superior mechanical strength and fracture toughness compared with conventional ceramic materials. Their excellent resistance to abrasion, chemicals, and high temperatures makes them ideal for semiconductor processing equipment, fluid handling systems, pumps, valves, precision machinery, and chemical processing applications.

With more than 20 years of engineering and manufacturing experience in advanced ceramic machining, our technical team works closely with customers and research institutions to develop customized ceramic solutions that meet complex application requirements.

Custom Precision Zirconia Ceramic Liner Sleeve Flanged ZrO2 Ceramic Tube Wear Resistant Industrial Ceramic Components Manufacturer


Key Features

Exceptional Wear Resistance

Zirconia offers outstanding hardness and abrasion resistance, significantly extending component service life in high-wear environments.

Superior Mechanical Strength

Compared with alumina ceramics, zirconia exhibits higher flexural strength and fracture toughness, reducing the risk of cracking under mechanical loads.

Excellent Corrosion Resistance

Highly resistant to acids, alkalis, solvents, and aggressive chemicals, ensuring long-term reliability in corrosive operating conditions.

High Dimensional Accuracy

Precision CNC machining and fine grinding processes achieve tight tolerances up to ±0.01 mm for critical industrial applications.

Electrical Insulation

Excellent dielectric properties make zirconia sleeves suitable for semiconductor, electronic, and high-voltage equipment.

Customized Manufacturing

Available according to customer drawings, samples, or design requirements with support for OEM and ODM projects.


Technical Advantages

  • Material: Zirconia (ZrO₂)

  • Density: ≥6.0 g/cm³

  • Hardness: ≥1200 HV

  • Flexural Strength: Up to 1200 MPa

  • Fracture Toughness: 7–10 MPa·m¹/²

  • Working Temperature: Up to 1000°C

  • Precision Tolerance: ±0.01 mm

  • Surface Finish: Ra 0.2–0.8 μm

  • Custom Sizes Available


Applications

Semiconductor Industry

  • Wafer processing equipment

  • Vacuum systems

  • Plasma processing equipment

  • Semiconductor handling systems

Chemical Industry

  • Corrosion-resistant liners

  • Pump and valve sleeves

  • Chemical transport systems

Mechanical Engineering

  • Precision bushings

  • Wear-resistant guide sleeves

  • Bearing protection components

Electronic Equipment

  • Electrical insulation components

  • High-voltage protection sleeves

  • Precision positioning systems


Why Choose Haorui Industrial Ceramics

✔ Over 20 Years of Advanced Ceramic Manufacturing Experience

✔ Precision CNC Machining & Grinding Technology

✔ Tolerance Capability up to ±0.01 mm

✔ Custom Design Based on Drawings or Samples

✔ Fast Prototype Development Support

✔ Strict Quality Inspection and Traceability

✔ Exported to Europe, North America, Japan and Southeast Asia

✔ Engineering Collaboration for New Product Development


Properties Of Different Zirconia Material



Property Item

3Y-TZP White

/Black

Mg-PSZ

Nano

3Y-TZP

Mechanical Characteristics Color Ivory/Black - Gold Yellow - BLUE -
Density 6.02
g/cm3 5.7 g/cm3 6.01 g/cm3
Bending Strength 800 MPa 450 MPa 1200 MPa
Compressive trength 3000 MPa 2500 MPa 3000 MPa
Elastic Modulus 200 GPa 250 GPa 220 GPa
Fracture Toughness 8 MPa m1/2 6~7 MPa m1/2 14 MPa m1/2
Weber Coefficient 15 m 12 m 25 m
Vickers Hardness 1200 HV 0.5 1100 HV 0.5 1200 HV 0.5
Thermal Characterics Coefficient of Line Thermal Expansion 10 10-6K-1 10 10-6K-1 10 10-6K-1
Thermal Conductivity 3 W/mK 3 W/mK 2 W/mK
Thermal Shock Resistance(Put in Water) 300 ΔT °C 450 ΔT °C 300 ΔT °C
Max Working Temperature 1000 °C 2100 °C 1000 °C
Electrical Characteristics Volume Resistance at 20°C >1013 Ωcm >1014 Ωcm >1013 Ωcm
Dielectric Strength 11×106 V/m 13 × 105 V/m 11×106 V/m
Dielectric Constant 33 εr 28 εr 33 εr
One MHZ Dielectric Loss Angle at 20°C 0.0016 tanδ 0.0017 tanδ 0.0016 tanδ
Chemical Characteristics Nitric Acid (60%) 90°C ≒0.00 WT Loss mg/cm2/day 0.1 WT Loss mg/cm2/day ≒0.00 WT Loss mg/cm2/day
Sulphuric Acid (95%) 95°C 0.04 0.34 0.03
Caustic Soda (30%) 80°C 0.08 0.95 0.06

This data is the result of laboratory testing. Customers need to judge whether it can be used according to the specific environment.





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